Structural and corrosion behaviour of stoichiometric and substoichiometric TiN thin films
نویسندگان
چکیده
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
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15 صفحه اولStructural, Electrical and Optical Properties of Molybdenum Oxide Thin Films Prepared by Post-annealing of Mo Thin Films
Molybdenum thin films with 50 and 150 nm thicknesses were deposited on silicon substrates, using DC magnetron sputtering system, then post-annealed at different temperatures (200, 325, 450, 575 and 700°C) with flow oxygen at 200 sccm (standard Cubic centimeter per minute). The crystallographic structure of the films was obtained by means of x-ray diffraction (XRD) analysis. An atomic force micr...
متن کاملStructural, Electrical and Optical Properties of Molybdenum Oxide Thin Films Prepared by Post-annealing of Mo Thin Films
Molybdenum thin films with 50 and 150 nm thicknesses were deposited on silicon substrates, using DC magnetron sputtering system, then post-annealed at different temperatures (200, 325, 450, 575 and 700°C) with flow oxygen at 200 sccm (standard Cubic centimeter per minute). The crystallographic structure of the films was obtained by means of x-ray diffraction (XRD) analysis. An atomic force micr...
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Influence of Co and Fe substitution on optical and structural properties of zinc oxide thin films
Zn0.97TM0.03O (TM = Co, Fe) thin films were deposited onto glass substrates by the sol–gel method and the effects of transition metals substitution on structural and optical properties of ZnO films were investigated. The X-ray diffraction patterns revealed that the films have wurtzite structure. Optical transmittance of the films was recorded in the range of 200 -800 nm wave length and the band...
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ژورنال
عنوان ژورنال: Surface and Coatings Technology
سال: 2004
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2003.10.059